A. Heuberger
About
A. Heuberger has authored 39 papers that have received a total of 1.9k indexed citations.
This includes 33 papers in Electrical and Electronic Engineering, 18 papers in Surfaces, Coatings and Films and 15 papers in Biomedical Engineering. The topics of these papers are Advancements in Photolithography Techniques (27 papers), Electron and X-Ray Spectroscopy Techniques (18 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers). A. Heuberger is often cited by papers focused on Advancements in Photolithography Techniques (27 papers), Electron and X-Ray Spectroscopy Techniques (18 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers) and collaborates with scholars based in Germany. A. Heuberger's co-authors include H. Betz, L. Csepregi, K.P. Müller, H.‐L. Huber and W.H. Bruenger and has published in prestigious journals such as Journal of The Electrochemical Society, IEEE Transactions on Electron Devices and Japanese Journal of Applied Physics
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