A. Shibayama

23 papers and 199 indexed citations i.

A. Shibayama has authored 23 papers that have received a total of 199 indexed citations. This includes 21 papers in Electrical and Electronic Engineering, 7 papers in Biomedical Engineering and 4 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advancements in Photolithography Techniques (10 papers), Semiconductor materials and devices (7 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers). A. Shibayama is often cited by papers focused on Advancements in Photolithography Techniques (10 papers), Semiconductor materials and devices (7 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers) and collaborates with scholars based in Japan. A. Shibayama's co-authors include Makoto Fukuda, Masanori Suzuki, Shuji Ishihara, Yoshio Nakamura and Kentaro Ito and has published in prestigious journals such as Proceedings of the IEEE, Japanese Journal of Applied Physics and Review of Scientific Instruments