Atsuro Nakano
About
Atsuro Nakano has authored 13 papers that have received a total of 667 indexed citations.
This includes 13 papers in Electrical and Electronic Engineering, 6 papers in Biomedical Engineering and 6 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (13 papers), Integrated Circuits and Semiconductor Failure Analysis (7 papers) and Electron and X-Ray Spectroscopy Techniques (6 papers). Atsuro Nakano is often cited by papers focused on Advancements in Photolithography Techniques (13 papers), Integrated Circuits and Semiconductor Failure Analysis (7 papers) and Electron and X-Ray Spectroscopy Techniques (6 papers) and collaborates with scholars based in Japan and United States. Atsuro Nakano's co-authors include Takahiro Kozawa, Seiichi Tagawa, Kazumasa Okamoto, Hiroki Yamamoto and Tomoyuki Ando and has published in prestigious journals such as Japanese Journal of Applied Physics
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