Bernd Loechel
About
Bernd Loechel has authored 30 papers that have received a total of 318 indexed citations.
This includes 21 papers in Electrical and Electronic Engineering, 15 papers in Biomedical Engineering and 6 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (13 papers), Nanofabrication and Lithography Techniques (9 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers). Bernd Loechel is often cited by papers focused on Advancements in Photolithography Techniques (13 papers), Nanofabrication and Lithography Techniques (9 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers) and collaborates with scholars based in Germany, United States and Taiwan. Bernd Loechel's co-authors include G. Gruetzner, Jost Goettert, Martin Bednarzik, Yohannes M. Desta and Gisela Ahrens and has published in prestigious journals such as Optics Express, Corrosion Science and Journal of Microelectromechanical Systems
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