Frank W. DelRio
About
Frank W. DelRio has authored 112 papers that have received a total of 3.1k indexed citations.
This includes 47 papers in Electrical and Electronic Engineering, 37 papers in Biomedical Engineering and 34 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Force Microscopy Techniques and Applications (29 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Advanced MEMS and NEMS Technologies (15 papers). Frank W. DelRio is often cited by papers focused on Force Microscopy Techniques and Applications (29 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Advanced MEMS and NEMS Technologies (15 papers) and collaborates with scholars based in United States, South Korea and Saudi Arabia. Frank W. DelRio's co-authors include Robert F. Cook, Vincent A. Hackley, Michael R. Zachariah, De-Hao Tsai and Maarten P. Boer and has published in prestigious journals such as Science, Proceedings of the National Academy of Sciences and Journal of the American Chemical Society
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