H. Betz

27 papers and 301 indexed citations i.

H. Betz has authored 27 papers that have received a total of 301 indexed citations. This includes 21 papers in Electrical and Electronic Engineering, 16 papers in Surfaces, Coatings and Films and 7 papers in Radiation. The topics of these papers are Advancements in Photolithography Techniques (17 papers), Electron and X-Ray Spectroscopy Techniques (16 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers). H. Betz is often cited by papers focused on Advancements in Photolithography Techniques (17 papers), Electron and X-Ray Spectroscopy Techniques (16 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers) and collaborates with scholars based in Germany and United States. H. Betz's co-authors include A. Heuberger, H.‐L. Huber, W. Schnabel, K.W. Schmid and D. Münchmeyer and has published in prestigious journals such as Thin Solid Films, IEEE Transactions on Electron Devices and Review of Scientific Instruments