H. Kattelus
About
H. Kattelus has authored 50 papers that have received a total of 832 indexed citations.
This includes 39 papers in Electrical and Electronic Engineering, 15 papers in Atomic and Molecular Physics, and Optics and 15 papers in Mechanics of Materials. The topics of these papers are Semiconductor materials and devices (21 papers), Advanced MEMS and NEMS Technologies (14 papers) and Metal and Thin Film Mechanics (12 papers). H. Kattelus is often cited by papers focused on Semiconductor materials and devices (21 papers), Advanced MEMS and NEMS Technologies (14 papers) and Metal and Thin Film Mechanics (12 papers) and collaborates with scholars based in Finland, United States and Japan. H. Kattelus's co-authors include Jyrki Kiihamäki, Riikka L. Puurunen, Jaakko Saarilahti, James Dekker and Heikki Seppä and has published in prestigious journals such as Journal of The Electrochemical Society, Thin Solid Films and Surface and Coatings Technology
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