H. Lorenz

13 papers and 1.6k indexed citations i.

H. Lorenz has authored 13 papers that have received a total of 1.6k indexed citations. This includes 11 papers in Electrical and Electronic Engineering, 10 papers in Biomedical Engineering and 2 papers in Mechanical Engineering. The topics of these papers are Advanced MEMS and NEMS Technologies (7 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers) and 3D IC and TSV technologies (4 papers). H. Lorenz is often cited by papers focused on Advanced MEMS and NEMS Technologies (7 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers) and 3D IC and TSV technologies (4 papers) and collaborates with scholars based in Switzerland and United States. H. Lorenz's co-authors include Philippe Renaud, M. Despont, P. Vettiger, G.-A. Racine and S. Roth and has published in prestigious journals such as Sensors and Actuators A Physical, Journal of Micromechanics and Microengineering and Microelectronic Engineering