Haruki Tokumaru

63 papers and 350 indexed citations i.

Haruki Tokumaru has authored 63 papers that have received a total of 350 indexed citations. This includes 45 papers in Electrical and Electronic Engineering, 37 papers in Control and Systems Engineering and 23 papers in Biomedical Engineering. The topics of these papers are Iterative Learning Control Systems (37 papers), Semiconductor Lasers and Optical Devices (36 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (20 papers). Haruki Tokumaru is often cited by papers focused on Iterative Learning Control Systems (37 papers), Semiconductor Lasers and Optical Devices (36 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (20 papers) and collaborates with scholars based in Japan. Haruki Tokumaru's co-authors include Kiyoshi Ohishi, Toshimasa Miyazaki, Kiyotaka Arai, Ryuji Sato and T. Kajiyama and has published in prestigious journals such as Applied Physics Letters, IEEE Transactions on Industrial Electronics and Applied Surface Science