Harutaka Mekaru

91 papers and 919 indexed citations i.

Harutaka Mekaru has authored 91 papers that have received a total of 919 indexed citations. This includes 69 papers in Electrical and Electronic Engineering, 67 papers in Biomedical Engineering and 14 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (47 papers), Advancements in Photolithography Techniques (36 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (24 papers). Harutaka Mekaru is often cited by papers focused on Nanofabrication and Lithography Techniques (47 papers), Advancements in Photolithography Techniques (36 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (24 papers) and collaborates with scholars based in Japan, United States and Singapore. Harutaka Mekaru's co-authors include Masaharu Takahashi, Tadashi Hattori, Michiru Yamashita, Hiroshi Goto and Ryutaro Maeda and has published in prestigious journals such as Applied Physics Letters, Advanced Drug Delivery Reviews and Sensors