Hideki Ina

20 papers and 2.9k indexed citations i.

Hideki Ina has authored 20 papers that have received a total of 2.9k indexed citations. This includes 19 papers in Electrical and Electronic Engineering, 8 papers in Mechanical Engineering and 7 papers in Biomedical Engineering. The topics of these papers are Advancements in Photolithography Techniques (15 papers), Advanced Measurement and Metrology Techniques (8 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers). Hideki Ina is often cited by papers focused on Advancements in Photolithography Techniques (15 papers), Advanced Measurement and Metrology Techniques (8 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers) and collaborates with scholars based in Japan, Germany and United States. Hideki Ina's co-authors include Satoru Oishi, Mitsuo Takeda, Kazuhiro Sato, Takahiro Matsumoto and Muneyoshi Suita and has published in prestigious journals such as Japanese Journal of Applied Physics