Hidetami Yaegashi
About
Hidetami Yaegashi has authored 47 papers that have received a total of 266 indexed citations.
This includes 43 papers in Electrical and Electronic Engineering, 26 papers in Biomedical Engineering and 19 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (42 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Optical Coatings and Gratings (15 papers). Hidetami Yaegashi is often cited by papers focused on Advancements in Photolithography Techniques (42 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Optical Coatings and Gratings (15 papers) and collaborates with scholars based in Japan, United States and The Netherlands. Hidetami Yaegashi's co-authors include Masatoshi Yamato, Michael C. Smayling, Ryo Nakayama, Hiroyuki Ishii and Paolo Di Lorenzo and has published in prestigious journals such as Journal of Applied Polymer Science, IEEE Transactions on Semiconductor Manufacturing and ECS Transactions
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