Hiroki Matsumura

12 papers and 112 indexed citations i.

Hiroki Matsumura has authored 12 papers that have received a total of 112 indexed citations. This includes 5 papers in Biomedical Engineering, 4 papers in Electrical and Electronic Engineering and 4 papers in Mechanical Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Advanced Measurement and Metrology Techniques (4 papers) and Optical measurement and interference techniques (2 papers). Hiroki Matsumura is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Advanced Measurement and Metrology Techniques (4 papers) and Optical measurement and interference techniques (2 papers) and collaborates with scholars based in Japan, United States and China. Hiroki Matsumura's co-authors include Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi, Keisuke Goda and Akihiro Isozaki and has published in prestigious journals such as Lab on a Chip, Nanoscale Research Letters and Current Applied Physics