Hisataka Hayashi
About
Hisataka Hayashi has authored 39 papers that have received a total of 450 indexed citations.
This includes 36 papers in Electrical and Electronic Engineering, 17 papers in Electronic, Optical and Magnetic Materials and 13 papers in Materials Chemistry. The topics of these papers are Semiconductor materials and devices (20 papers), Plasma Diagnostics and Applications (18 papers) and Copper Interconnects and Reliability (17 papers). Hisataka Hayashi is often cited by papers focused on Semiconductor materials and devices (20 papers), Plasma Diagnostics and Applications (18 papers) and Copper Interconnects and Reliability (17 papers) and collaborates with scholars based in Japan, South Korea and United States. Hisataka Hayashi's co-authors include Makoto Sekine, Satoshi Morishita, Hiroshi Yamamoto, Akihiro Kojima and Masami Inoue and has published in prestigious journals such as Journal of Applied Physics, Chemical Engineering Science and Japanese Journal of Applied Physics
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