Hisatake Sano
About
Hisatake Sano has authored 32 papers that have received a total of 533 indexed citations.
This includes 17 papers in Electrical and Electronic Engineering, 7 papers in Surfaces, Coatings and Films and 6 papers in Biomedical Engineering. The topics of these papers are Advancements in Photolithography Techniques (11 papers), Electron and X-Ray Spectroscopy Techniques (6 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers). Hisatake Sano is often cited by papers focused on Advancements in Photolithography Techniques (11 papers), Electron and X-Ray Spectroscopy Techniques (6 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers) and collaborates with scholars based in Japan, United States and Czechia. Hisatake Sano's co-authors include J. Chiba, K. Tokushuku, Naoya Hayashi, I. Arai and Hiroyuki Miyashita and has published in prestigious journals such as Physical Review Letters, The Journal of Chemical Physics and Physics Letters B
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