J. Logan

9 papers and 287 indexed citations i.

J. Logan has authored 9 papers that have received a total of 287 indexed citations. This includes 7 papers in Electrical and Electronic Engineering, 5 papers in Biomedical Engineering and 3 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers), Advanced MEMS and NEMS Technologies (4 papers) and 3D IC and TSV technologies (3 papers). J. Logan is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (5 papers), Advanced MEMS and NEMS Technologies (4 papers) and 3D IC and TSV technologies (3 papers) and collaborates with scholars based in United States, United Kingdom and Czechia. J. Logan's co-authors include J.M. Noworolski, E.H. Klaassen, K. Petersen, N.I. Maluf and A G R Evans and has published in prestigious journals such as Applied Physics Letters, Sensors and Actuators A Physical and Solid-State Electronics