Jaehyuk Chang
About
Jaehyuk Chang has authored 15 papers that have received a total of 229 indexed citations.
This includes 11 papers in Electrical and Electronic Engineering, 6 papers in Biomedical Engineering and 3 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advancements in Photolithography Techniques (7 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers) and Nanofabrication and Lithography Techniques (2 papers). Jaehyuk Chang is often cited by papers focused on Advancements in Photolithography Techniques (7 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers) and Nanofabrication and Lithography Techniques (2 papers) and collaborates with scholars based in South Korea, United States and Japan. Jaehyuk Chang's co-authors include Edward G. Lovell, Roxann L. Engelstad, Jung‐Woo Seo, Sukwon Lee and Jaegul Choo and has published in prestigious journals such as Review of Scientific Instruments, Journal of Micromechanics and Microengineering and ECS Journal of Solid State Science and Technology
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