Jari Mäkinen
About
Jari Mäkinen has authored 31 papers that have received a total of 468 indexed citations.
This includes 13 papers in Electrical and Electronic Engineering, 10 papers in Biomedical Engineering and 8 papers in Pollution. The topics of these papers are 3D IC and TSV technologies (8 papers), Heavy metals in environment (8 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers). Jari Mäkinen is often cited by papers focused on 3D IC and TSV technologies (8 papers), Heavy metals in environment (8 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers) and collaborates with scholars based in Finland, United States and Germany. Jari Mäkinen's co-authors include Kimmo Henttinen, Tommi Kauppila, James Dekker, Tommi Suni and Seppo Hellsten and has published in prestigious journals such as Journal of Applied Physics, Journal of The Electrochemical Society and Thin Solid Films
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