J.M. Bustillo

10 papers and 627 indexed citations i.

J.M. Bustillo has authored 10 papers that have received a total of 627 indexed citations. This includes 7 papers in Electrical and Electronic Engineering, 6 papers in Biomedical Engineering and 2 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advanced MEMS and NEMS Technologies (4 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers) and Semiconductor materials and devices (3 papers). J.M. Bustillo is often cited by papers focused on Advanced MEMS and NEMS Technologies (4 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers) and Semiconductor materials and devices (3 papers) and collaborates with scholars based in United States. J.M. Bustillo's co-authors include Roger T. Howe, Jonathan M. Rothberg, P. Rosenthal, Richard W. Hammond and Joel S. Bader and has published in prestigious journals such as Proceedings of the National Academy of Sciences, Applied Physics Letters and Proceedings of the IEEE