Joachim Frühauf

32 papers and 279 indexed citations i.

Joachim Frühauf has authored 32 papers that have received a total of 279 indexed citations. This includes 14 papers in Biomedical Engineering, 13 papers in Electrical and Electronic Engineering and 11 papers in Mechanical Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (12 papers), Advanced MEMS and NEMS Technologies (9 papers) and Advanced Measurement and Metrology Techniques (6 papers). Joachim Frühauf is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (12 papers), Advanced MEMS and NEMS Technologies (9 papers) and Advanced Measurement and Metrology Techniques (6 papers) and collaborates with scholars based in Germany, Poland and France. Joachim Frühauf's co-authors include H. G. Schneider, Uwe Brand, J. Vetter, Udo Loeschner and Ludger Koenders and has published in prestigious journals such as Materials Science and Engineering A, Sensors and Wear.