Kathleen Nafus

57 papers and 450 indexed citations i.

About

Kathleen Nafus has authored 57 papers that have received a total of 450 indexed citations. This includes 49 papers in Electrical and Electronic Engineering, 23 papers in Surfaces, Coatings and Films and 13 papers in Biomedical Engineering. The topics of these papers are Advancements in Photolithography Techniques (47 papers), Integrated Circuits and Semiconductor Failure Analysis (21 papers) and Electron and X-Ray Spectroscopy Techniques (17 papers). Kathleen Nafus is often cited by papers focused on Advancements in Photolithography Techniques (47 papers), Integrated Circuits and Semiconductor Failure Analysis (21 papers) and Electron and X-Ray Spectroscopy Techniques (17 papers) and collaborates with scholars based in Belgium, Japan and United States. Kathleen Nafus's co-authors include Roel Gronheid, Mark Somervell, Paul F. Nealey, Todd R. Younkin and Dieter Van den Heuvel and has published in prestigious journals such as ECS Journal of Solid State Science and Technology, ECS Transactions and Journal of Micro/Nanolithography MEMS and MOEMS

In The Last Decade

Rankless by CCL
2025