Kazuo Moriya

16 papers and 370 indexed citations i.

Kazuo Moriya has authored 16 papers that have received a total of 370 indexed citations. This includes 7 papers in Electrical and Electronic Engineering, 7 papers in Biomedical Engineering and 4 papers in Computational Mechanics. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Silicon and Solar Cell Technologies (4 papers) and Surface Roughness and Optical Measurements (4 papers). Kazuo Moriya is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Silicon and Solar Cell Technologies (4 papers) and Surface Roughness and Optical Measurements (4 papers) and collaborates with scholars based in Japan and Germany. Kazuo Moriya's co-authors include Tomoya Ogawa, Katsuyuki Hirai, Hideo Wada, T. Gonda and Takeshi Mitsuda and has published in prestigious journals such as Journal of Applied Physics, Japanese Journal of Applied Physics and Journal of Crystal Growth