Kimiyoshi Deguchi

36 papers and 345 indexed citations i.

Kimiyoshi Deguchi has authored 36 papers that have received a total of 345 indexed citations. This includes 33 papers in Electrical and Electronic Engineering, 14 papers in Biomedical Engineering and 12 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (31 papers), Electron and X-Ray Spectroscopy Techniques (12 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers). Kimiyoshi Deguchi is often cited by papers focused on Advancements in Photolithography Techniques (31 papers), Electron and X-Ray Spectroscopy Techniques (12 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers) and collaborates with scholars based in Japan. Kimiyoshi Deguchi's co-authors include Hiroshi Ban, Jiro Nakamura, Akinobu Tanaka, Makoto Fukuda and Yoshio Kawai and has published in prestigious journals such as Japanese Journal of Applied Physics, Journal of Applied Polymer Science and Journal of Electron Spectroscopy and Related Phenomena