Kuo‐Shen Chen
About
Kuo‐Shen Chen has authored 94 papers that have received a total of 1.7k indexed citations.
This includes 50 papers in Electrical and Electronic Engineering, 44 papers in Biomedical Engineering and 33 papers in Mechanics of Materials. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (31 papers), Advanced MEMS and NEMS Technologies (21 papers) and Metal and Thin Film Mechanics (20 papers). Kuo‐Shen Chen is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (31 papers), Advanced MEMS and NEMS Technologies (21 papers) and Metal and Thin Film Mechanics (20 papers) and collaborates with scholars based in Taiwan, United States and Czechia. Kuo‐Shen Chen's co-authors include S.M. Spearing, Arturo A. Ayón, Tian-Shiang Yang, Tz-Cheng Chiu and Kenneth Breuer and has published in prestigious journals such as Applied Physics Letters, Journal of The Electrochemical Society and IEEE Transactions on Industrial Electronics.
In The Last Decade
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