Masatoshi Kotera

40 papers and 336 indexed citations i.

Masatoshi Kotera has authored 40 papers that have received a total of 336 indexed citations. This includes 39 papers in Surfaces, Coatings and Films, 31 papers in Electrical and Electronic Engineering and 10 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Electron and X-Ray Spectroscopy Techniques (39 papers), Advancements in Photolithography Techniques (28 papers) and Integrated Circuits and Semiconductor Failure Analysis (10 papers). Masatoshi Kotera is often cited by papers focused on Electron and X-Ray Spectroscopy Techniques (39 papers), Advancements in Photolithography Techniques (28 papers) and Integrated Circuits and Semiconductor Failure Analysis (10 papers) and collaborates with scholars based in Japan, United States and Cambodia. Masatoshi Kotera's co-authors include Hiroshi Suga, Kenji Murata, Masaaki Yasuda, Satoru Yamaguchi and Keiji Tamura and has published in prestigious journals such as Journal of Applied Physics, Japanese Journal of Applied Physics and Review of Scientific Instruments