Michio Uneda
About
Michio Uneda has authored 63 papers that have received a total of 429 indexed citations.
This includes 45 papers in Biomedical Engineering, 26 papers in Mechanical Engineering and 23 papers in Electrical and Electronic Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (43 papers), Advanced machining processes and optimization (20 papers) and Advanced Machining and Optimization Techniques (9 papers). Michio Uneda is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (43 papers), Advanced machining processes and optimization (20 papers) and Advanced Machining and Optimization Techniques (9 papers) and collaborates with scholars based in Japan. Michio Uneda's co-authors include Toshiro Doi, Hideo Aida, Ken-Ichi Ishikawa, Syuhei KUROKAWA and Osamu Ohnishi and has published in prestigious journals such as Journal of The Electrochemical Society, Japanese Journal of Applied Physics and Current Applied Physics
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