Minoru Toriumi
About
Minoru Toriumi has authored 57 papers that have received a total of 542 indexed citations.
This includes 43 papers in Electrical and Electronic Engineering, 24 papers in Biomedical Engineering and 16 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (37 papers), Nanofabrication and Lithography Techniques (16 papers) and Electron and X-Ray Spectroscopy Techniques (13 papers). Minoru Toriumi is often cited by papers focused on Advancements in Photolithography Techniques (37 papers), Nanofabrication and Lithography Techniques (16 papers) and Electron and X-Ray Spectroscopy Techniques (13 papers) and collaborates with scholars based in Japan and United States. Minoru Toriumi's co-authors include Toshiro Itani, Seiichi Ishikawa, Hiroshi Masuhara, Takuji Ishikawa and Hirokazu Aoyama and has published in prestigious journals such as The Journal of Chemical Physics, Chemistry of Materials and Journal of Materials Chemistry
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