Mitsuru Satô
About
Mitsuru Satô has authored 38 papers that have received a total of 1.2k indexed citations.
This includes 31 papers in Electrical and Electronic Engineering, 18 papers in Biomedical Engineering and 8 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (27 papers), Nanofabrication and Lithography Techniques (15 papers) and Integrated Circuits and Semiconductor Failure Analysis (11 papers). Mitsuru Satô is often cited by papers focused on Advancements in Photolithography Techniques (27 papers), Nanofabrication and Lithography Techniques (15 papers) and Integrated Circuits and Semiconductor Failure Analysis (11 papers) and collaborates with scholars based in Japan, Germany and United States. Mitsuru Satô's co-authors include Seiichi Tagawa, Takahiro Kozawa, Hiroki Yamamoto, Hiroji Komano and Tomoyuki Ando and has published in prestigious journals such as Angewandte Chemie International Edition, Japanese Journal of Applied Physics and Journal of Crystal Growth
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