Osamu Suga
About
Osamu Suga has authored 70 papers that have received a total of 409 indexed citations.
This includes 66 papers in Electrical and Electronic Engineering, 38 papers in Surfaces, Coatings and Films and 21 papers in Industrial and Manufacturing Engineering. The topics of these papers are Advancements in Photolithography Techniques (59 papers), Electron and X-Ray Spectroscopy Techniques (38 papers) and Integrated Circuits and Semiconductor Failure Analysis (33 papers). Osamu Suga is often cited by papers focused on Advancements in Photolithography Techniques (59 papers), Electron and X-Ray Spectroscopy Techniques (38 papers) and Integrated Circuits and Semiconductor Failure Analysis (33 papers) and collaborates with scholars based in Japan. Osamu Suga's co-authors include Toshihiko Tanaka, Tsuneo Terasawa, Takeshi Yamane, Tsuyoshi Amano and Hajime Aoyama and has published in prestigious journals such as Japanese Journal of Applied Physics, Microelectronic Engineering and Journal of Micro/Nanolithography MEMS and MOEMS
In The Last Decade
Explore authors with similar magnitude of impact
Top authors papers by A. V. Vorontsov are co-authored with Top fields papers by Jan Hamhalter are about Top journals papers by S. Gilardoni are published in Top countries impacted by papers by Katarzyna Kosińska–Kaczyńska Top countries impacted by papers by A Chlumská Top countries impacted by papers by Sumardi Sumardi Top authors papers by Beatriz F. Giraldo are co-authored with Top fields papers by Н. И. Суслов are about