Patrick A. Kearney

81 papers and 779 indexed citations i.

Patrick A. Kearney has authored 81 papers that have received a total of 779 indexed citations. This includes 66 papers in Electrical and Electronic Engineering, 57 papers in Surfaces, Coatings and Films and 12 papers in Mechanical Engineering. The topics of these papers are Advancements in Photolithography Techniques (56 papers), Electron and X-Ray Spectroscopy Techniques (51 papers) and Integrated Circuits and Semiconductor Failure Analysis (23 papers). Patrick A. Kearney is often cited by papers focused on Advancements in Photolithography Techniques (56 papers), Electron and X-Ray Spectroscopy Techniques (51 papers) and Integrated Circuits and Semiconductor Failure Analysis (23 papers) and collaborates with scholars based in United States, Belgium and Canada. Patrick A. Kearney's co-authors include Frank Goodwin, Charles M. Falco, J. M. Slaughter, Kenneth A. Goldberg and Eberhard Spiller and has published in prestigious journals such as Journal of Applied Physics, Acta Materialia and Optics Letters.