Patrick Jaenen
About
Patrick Jaenen has authored 34 papers that have received a total of 739 indexed citations.
This includes 33 papers in Electrical and Electronic Engineering, 16 papers in Biomedical Engineering and 8 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advancements in Photolithography Techniques (21 papers), Integrated Circuits and Semiconductor Failure Analysis (10 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (9 papers). Patrick Jaenen is often cited by papers focused on Advancements in Photolithography Techniques (21 papers), Integrated Circuits and Semiconductor Failure Analysis (10 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (9 papers) and collaborates with scholars based in Belgium, The Netherlands and United States. Patrick Jaenen's co-authors include Pieter Dumon, Dries Van Thourhout, S. Beckx, Wim Bogaerts and Johan Wouters and has published in prestigious journals such as Optics Express, Japanese Journal of Applied Physics and Journal of Lightwave Technology
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