Patrick Naulleau
About
Patrick Naulleau has authored 294 papers that have received a total of 2.9k indexed citations.
This includes 253 papers in Electrical and Electronic Engineering, 163 papers in Surfaces, Coatings and Films and 96 papers in Radiation. The topics of these papers are Advancements in Photolithography Techniques (237 papers), Electron and X-Ray Spectroscopy Techniques (132 papers) and Integrated Circuits and Semiconductor Failure Analysis (115 papers). Patrick Naulleau is often cited by papers focused on Advancements in Photolithography Techniques (237 papers), Electron and X-Ray Spectroscopy Techniques (132 papers) and Integrated Circuits and Semiconductor Failure Analysis (115 papers) and collaborates with scholars based in United States, South Korea and Germany. Patrick Naulleau's co-authors include Kenneth A. Goldberg, Jeffrey Bokor, Eric M. Gullikson, Paul Denham and Senajith Rekawa and has published in prestigious journals such as Advanced Materials, The Journal of Chemical Physics and Applied Physics Letters
In The Last Decade
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