P.M. Osterberg

12 papers and 737 indexed citations i.

P.M. Osterberg has authored 12 papers that have received a total of 737 indexed citations. This includes 9 papers in Electrical and Electronic Engineering, 8 papers in Biomedical Engineering and 6 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advanced MEMS and NEMS Technologies (6 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers) and Acoustic Wave Resonator Technologies (3 papers). P.M. Osterberg is often cited by papers focused on Advanced MEMS and NEMS Technologies (6 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers) and Acoustic Wave Resonator Technologies (3 papers) and collaborates with scholars based in United States, The Netherlands and Iran. P.M. Osterberg's co-authors include S.D. Senturia, Raj Kumar Gupta, Jacob White, Xiao‐Chuan Cai and John R. Gilbert and has published in prestigious journals such as American Journal of Physics, Electronics Letters and Journal of Microelectromechanical Systems