Robert Kirchner
About
Robert Kirchner has authored 58 papers that have received a total of 522 indexed citations.
This includes 43 papers in Biomedical Engineering, 30 papers in Electrical and Electronic Engineering and 10 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (35 papers), Advancements in Photolithography Techniques (19 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (12 papers). Robert Kirchner is often cited by papers focused on Nanofabrication and Lithography Techniques (35 papers), Advancements in Photolithography Techniques (19 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (12 papers) and collaborates with scholars based in Germany, Switzerland and China. Robert Kirchner's co-authors include Helmut Schift, Wolf‐Joachim Fischer, Vitaliy A. Guzenko, Roberto Fallica and B. Adolphi and has published in prestigious journals such as Advanced Materials, Journal of The Electrochemical Society and ACS Applied Materials & Interfaces
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