S. R. Patterson

16 papers and 354 indexed citations i.

S. R. Patterson has authored 16 papers that have received a total of 354 indexed citations. This includes 10 papers in Mechanical Engineering, 9 papers in Electrical and Electronic Engineering and 6 papers in Biomedical Engineering. The topics of these papers are Advanced Measurement and Metrology Techniques (6 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers) and Advanced MEMS and NEMS Technologies (3 papers). S. R. Patterson is often cited by papers focused on Advanced Measurement and Metrology Techniques (6 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers) and Advanced MEMS and NEMS Technologies (3 papers) and collaborates with scholars based in United States, Australia and Germany. S. R. Patterson's co-authors include A. B. Meinel, Marjorie P. Meinel, Theodore T. Saito, Vivek G. Badami and R. R. Donaldson and has published in prestigious journals such as Review of Scientific Instruments, International Journal of Production Research and CIRP Annals