Seiji Nagahara

35 papers and 442 indexed citations i.

About

Seiji Nagahara has authored 35 papers that have received a total of 442 indexed citations. This includes 33 papers in Electrical and Electronic Engineering, 18 papers in Biomedical Engineering and 7 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (30 papers), Integrated Circuits and Semiconductor Failure Analysis (14 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers). Seiji Nagahara is often cited by papers focused on Advancements in Photolithography Techniques (30 papers), Integrated Circuits and Semiconductor Failure Analysis (14 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers) and collaborates with scholars based in Japan, United States and The Netherlands. Seiji Nagahara's co-authors include Seiichi Tagawa, Takahiro Kitano, Akihiro Oshima, Gijsbert Rispens and Makoto Muramatsu and has published in prestigious journals such as Japanese Journal of Applied Physics, IEEE Transactions on Semiconductor Manufacturing and Journal of Micro/Nanolithography MEMS and MOEMS

In The Last Decade

Rankless by CCL
2025