Shengyi Li

162 papers and 2.1k indexed citations i.

Shengyi Li has authored 162 papers that have received a total of 2.1k indexed citations. This includes 74 papers in Biomedical Engineering, 68 papers in Mechanical Engineering and 48 papers in Electrical and Electronic Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (64 papers), Advanced Measurement and Metrology Techniques (43 papers) and Optical measurement and interference techniques (26 papers). Shengyi Li is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (64 papers), Advanced Measurement and Metrology Techniques (43 papers) and Optical measurement and interference techniques (26 papers) and collaborates with scholars based in China, United States and Taiwan. Shengyi Li's co-authors include Yifan Dai, Shanyong Chen, Xuhui Xie, Lin Zhou and Chaoliang Guan and has published in prestigious journals such as Advanced Materials, Chemical Communications and International Journal of Molecular Sciences