Shigeaki Goto

14 papers and 375 indexed citations i.

Shigeaki Goto has authored 14 papers that have received a total of 375 indexed citations. This includes 9 papers in Mechanical Engineering, 8 papers in Biomedical Engineering and 6 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers), Force Microscopy Techniques and Applications (6 papers) and Advanced Thermodynamic Systems and Engines (4 papers). Shigeaki Goto is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (6 papers), Force Microscopy Techniques and Applications (6 papers) and Advanced Thermodynamic Systems and Engines (4 papers) and collaborates with scholars based in Japan, Switzerland and China. Shigeaki Goto's co-authors include Yuki Shimizu, Wei Gao, Yoshihiro Hotta, So Ito and Hidemasa Kosaka and has published in prestigious journals such as CIRP Annals, SAE technical papers on CD-ROM/SAE technical paper series and Measurement Science and Technology