Soichi Owa

45 papers and 359 indexed citations i.

Soichi Owa has authored 45 papers that have received a total of 359 indexed citations. This includes 33 papers in Electrical and Electronic Engineering, 22 papers in Biomedical Engineering and 9 papers in Computational Mechanics. The topics of these papers are Advancements in Photolithography Techniques (26 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers). Soichi Owa is often cited by papers focused on Advancements in Photolithography Techniques (26 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (15 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers) and collaborates with scholars based in United States and Japan. Soichi Owa's co-authors include Yusuke Mori, Takatomo Sasaki, Tomoyuki Matsuyama, Hiromasa Hirakawa and Naomasa Shiraishi and has published in prestigious journals such as Applied Physics Letters, Japanese Journal of Applied Physics and Journal of the Physical Society of Japan