Sumio Kamiya
About
Sumio Kamiya has authored 19 papers that have received a total of 324 indexed citations.
This includes 12 papers in Materials Chemistry, 10 papers in Mechanical Engineering and 9 papers in Electrical and Electronic Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers), Diamond and Carbon-based Materials Research (4 papers) and Integrated Circuits and Semiconductor Failure Analysis (3 papers). Sumio Kamiya is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers), Diamond and Carbon-based Materials Research (4 papers) and Integrated Circuits and Semiconductor Failure Analysis (3 papers) and collaborates with scholars based in Japan, China and Norway. Sumio Kamiya's co-authors include Kazumichi Yanagisawa, Hiroshi Eda, Haijun Tao, Jun Shimizu and Li Zhou and has published in prestigious journals such as Journal of Solid State Chemistry, CIRP Annals and Crystal Growth & Design
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