Susumu Sugiyama
About
Susumu Sugiyama has authored 170 papers that have received a total of 2.5k indexed citations.
This includes 124 papers in Electrical and Electronic Engineering, 105 papers in Biomedical Engineering and 58 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advanced MEMS and NEMS Technologies (70 papers), Mechanical and Optical Resonators (43 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (21 papers). Susumu Sugiyama is often cited by papers focused on Advanced MEMS and NEMS Technologies (70 papers), Mechanical and Optical Resonators (43 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (21 papers) and collaborates with scholars based in Japan, China and United States. Susumu Sugiyama's co-authors include Dzung Viet Dao, Van Thanh Dau, Toshiyuki Toriyama, Thien Xuan Dinh and Katsuhiko Tanaka and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Physical Review B
In The Last Decade
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