T. Kato

45 papers and 352 indexed citations i.

T. Kato has authored 45 papers that have received a total of 352 indexed citations. This includes 28 papers in Electrical and Electronic Engineering, 14 papers in Surfaces, Coatings and Films and 10 papers in Surgery. The topics of these papers are Integrated Circuits and Semiconductor Failure Analysis (16 papers), Electron and X-Ray Spectroscopy Techniques (14 papers) and Advancements in Photolithography Techniques (12 papers). T. Kato is often cited by papers focused on Integrated Circuits and Semiconductor Failure Analysis (16 papers), Electron and X-Ray Spectroscopy Techniques (14 papers) and Advancements in Photolithography Techniques (12 papers) and collaborates with scholars based in Japan, United States and Germany. T. Kato's co-authors include Tadashi INABA, Yuichi Kasai, Hiroaki Morimoto, H. Nakata and Takashi Matsukawa and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Journal of The Electrochemical Society