Takeshi Ohfuji

52 papers and 324 indexed citations i.

About

Takeshi Ohfuji has authored 52 papers that have received a total of 324 indexed citations. This includes 49 papers in Electrical and Electronic Engineering, 20 papers in Biomedical Engineering and 10 papers in Computational Mechanics. The topics of these papers are Advancements in Photolithography Techniques (41 papers), Nanofabrication and Lithography Techniques (10 papers) and Copper Interconnects and Reliability (8 papers). Takeshi Ohfuji is often cited by papers focused on Advancements in Photolithography Techniques (41 papers), Nanofabrication and Lithography Techniques (10 papers) and Copper Interconnects and Reliability (8 papers) and collaborates with scholars based in Japan and United States. Takeshi Ohfuji's co-authors include Katsumi Maeda, Etsuo Hasegawa, Masaru Sasago, Masayuki Endo and Kunihiro Ichimura and has published in prestigious journals such as Journal of Materials Chemistry, Japanese Journal of Applied Physics and Journal of Photopolymer Science and Technology

In The Last Decade

Rankless by CCL
2025