Tomi Haatainen
About
Tomi Haatainen has authored 26 papers that have received a total of 579 indexed citations.
This includes 21 papers in Electrical and Electronic Engineering, 20 papers in Biomedical Engineering and 4 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (20 papers), Advancements in Photolithography Techniques (13 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers). Tomi Haatainen is often cited by papers focused on Nanofabrication and Lithography Techniques (20 papers), Advancements in Photolithography Techniques (13 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (7 papers) and collaborates with scholars based in Finland, Switzerland and United States. Tomi Haatainen's co-authors include Jouni Ahopelto, Tapio Mäkelä, Helmut Schift, Anders Kristensen and Anna Klukowska and has published in prestigious journals such as Nature Materials, Chemistry of Materials and Japanese Journal of Applied Physics.
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