Ulrich Plachetka
About
Ulrich Plachetka has authored 35 papers that have received a total of 745 indexed citations.
This includes 31 papers in Biomedical Engineering, 26 papers in Electrical and Electronic Engineering and 5 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (22 papers), Advancements in Photolithography Techniques (18 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers). Ulrich Plachetka is often cited by papers focused on Nanofabrication and Lithography Techniques (22 papers), Advancements in Photolithography Techniques (18 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers) and collaborates with scholars based in Germany, Belgium and Denmark. Ulrich Plachetka's co-authors include H. Kurz, Markus Bender, Andreas Fuchs, Christian Moormann and T. Wahlbrink and has published in prestigious journals such as Langmuir, Scientific Reports and ACS Applied Materials & Interfaces
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