Yu. D. Filatov

45 papers and 497 indexed citations i.

Yu. D. Filatov has authored 45 papers that have received a total of 497 indexed citations. This includes 39 papers in Biomedical Engineering, 19 papers in Mechanical Engineering and 18 papers in Computational Mechanics. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (33 papers), Advanced machining processes and optimization (16 papers) and Laser Material Processing Techniques (15 papers). Yu. D. Filatov is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (33 papers), Advanced machining processes and optimization (16 papers) and Laser Material Processing Techniques (15 papers) and collaborates with scholars based in Ukraine, Germany and France. Yu. D. Filatov's co-authors include Michael Storchak, Uwe Heisel, Guy Monteil, A. Boyaryntsev and В. Н. Ткач and has published in prestigious journals such as Optical Engineering, Production Engineering and Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena