Yutaka Ezaki

6 papers and 17 indexed citations i.

Yutaka Ezaki has authored 6 papers that have received a total of 17 indexed citations. This includes 4 papers in Mechanical Engineering, 3 papers in Biomedical Engineering and 2 papers in Control and Systems Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers), Hydraulic and Pneumatic Systems (2 papers) and Advanced Measurement and Metrology Techniques (2 papers). Yutaka Ezaki is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (3 papers), Hydraulic and Pneumatic Systems (2 papers) and Advanced Measurement and Metrology Techniques (2 papers) and collaborates with scholars based in Japan. Yutaka Ezaki's co-authors include Toshitaka Nakaoji, Noboru Kawaguchi, Katsuhiko YAMADA, Kazuhiko Fukushima and Masaki Tabata and has published in prestigious journals such as and