Chemical Vapor Deposition

1.0k papers and 23.0k indexed citations i.

The 1.0k papers published in Chemical Vapor Deposition in the last decades have received a total of 23.0k indexed citations. Papers published in Chemical Vapor Deposition usually cover Electrical and Electronic Engineering (677 papers), Materials Chemistry (670 papers) and Electronic, Optical and Magnetic Materials (251 papers) specifically the topics of Semiconductor materials and devices (474 papers), Electronic and Structural Properties of Oxides (168 papers) and Copper Interconnects and Reliability (163 papers). The most active scholars publishing in Chemical Vapor Deposition are Mikko Ritala, Markku Leskelä, Anthony C. Jones, Ivan P. Parkin and Paul O’Brien