Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

16.3k papers and 306.4k indexed citations i.

The 16.3k papers published in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films in the last decades have received a total of 306.4k indexed citations. Papers published in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films usually cover Electrical and Electronic Engineering (9.2k papers), Materials Chemistry (6.8k papers) and Atomic and Molecular Physics, and Optics (4.2k papers) specifically the topics of Semiconductor materials and devices (4.5k papers), Metal and Thin Film Mechanics (3.3k papers) and Plasma Diagnostics and Applications (1.9k papers). The most active scholars publishing in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films are G. S. Oehrlein, Lars Hultman, W. M. M. Kessels, I. Petrov and Mark J. Kushner