Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

3.7k papers and 31.6k indexed citations i.

About

The 3.7k papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena in the last decades have received a total of 31.6k indexed citations. Papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena usually cover Electrical and Electronic Engineering (2.5k papers), Materials Chemistry (1.4k papers) and Biomedical Engineering (1.1k papers) specifically the topics of Semiconductor materials and devices (996 papers), Advancements in Photolithography Techniques (435 papers) and Integrated Circuits and Semiconductor Failure Analysis (367 papers). The most active scholars publishing in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena are S. J. Pearton, F. Ren, Jihyun Kim, Lu Liu and David J. Smith.

In The Last Decade

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2025